GDMS2011 Gdevice Technical Reports

2011年2月9日開催の国際会議 GDMS2011 (International Workshop on Green Devices and Micro Systems)において、Gデバイス@BEANS(GDC及びGDC関西)から以下のように多くの研究論文を発表しました(口頭、ポスター)。
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また、当日はGデバイス@BEANSにて整備された最新MEMS関連設備およびセンサーネットクリーンルームの見学会も併せて実施しました。
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 PROJECT OVERVIEW
G-Device@BEANS Project for Green Innovation
   Toshihiro Itoh
Overview of G-device Project for Green Innovation at Center Kansai
   Susumu Sugiyama
Gdevice@BEANSの全体イメージ

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 ORAL SESSION
Green Operation on demand (GOOD) for clean room
   K. Ando
Development of Wireless Smart Multisensor Devices for a Green World
   Hiroshi Imamoto
MEMS Particle sensor for green operation on demand (GOOD)
   H. Sven
Micro coil fabrication for ubiquitous power monitoring
   Y. Zhang
Ultra Low Power Consumption IC for Green device
   T Fujimori
Environment Friendly MEMS process
   D. Dzung
ORAL SESSION POSTER CONTRIBUTIONS

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 POSTER CONTRIBUTIONS
Wireless Smart Multi-sensor Devices
   Hiroshi Imamoto
High sensitivity at high gas concentration gas sensor using porous SnO2 on trench substrate
   Minoru Abasaki, Shinichi Souma, Nobuyuki Moronuki, Masakazu Sugiyama
Modeling of VB-FET Taking into Account Electro-Mechanical
   Sinji Ueki, Yuki Nishimori, Hiroshi Imamoto and Gen Hashiguchi
Vibration-driven Electret Energy Harvester
   K.Yamashita, M.Honzumi, and Y.Suzuki
VUV-based High-speed Electret Charging
   M. Honzumi, K. Hagiwara, Y. Iguchi, and Y. Suzuki
Development of Piezoelectric Flow Sensor For Wake-up Switch
   Yutaka Tomimatsu, Koichi Moriya, and Masataka Shinogi
Development of Pollution Gas Sensors for the Energy Saving in a Clean Room
   Kyoji Shibuya, Dzung Viet Dao and Yutaka Yamagishi
Ferroelectric Thin Films for MEMS Sensors and Actuators
   T. Matsushima and I. Kanno
RT: Real-time Position Tracking System
   Ranjith Amarasinghe
Green 8 inch MEMS prototype station “TKB812”
   G Device Center, BEANS Laboratory
Development of environment-friendly integration processes
   Nobuaki Konno, Hideki Takagi, and Takashi Tokunaga
Development of Low GWP Emission Si Etching Process
  -In-situ monitoring technique on DRIE process for high rate, high aspect ratio etchiing-
   Junji Ohara, Takuya Iwasaki
Sensor-net Plant Factory
   Takanori Shimura
Selectively-Method to Evaluate the Influence of Surface Loss on Micro-Cantilever
   Y. Nishimori, S. Ueki, T. Kubota and G. Hashiguchi
Process Deviation Check using a Scanning Multi-Probe Nano Lithography System
   Y. Tomizawa, K. Suzuki, Y. Nishimori, Y. F. Li and G. Hashiguchi
Construction of a process platform for 8-inch MEMS prototyping
   Toshio Sakamizu, Katsuyori Suzuki, Makoto saito, Toshibumi Uryu
Development of evaluation methodology for fluctuation of characteristics result
   from fabrication variability
   Nobuyo Fujiwara, Kazuo Asaumi, Shunsuke Mochizuki, Noriyuki Ishihara, Katsuyori Suzuki,
   Yuki Nishimori, Gen Hashiguchi
Smart fabrication system for MEMS by information sharing
   Naoki TANIMURA, Nobuyo FUJIWARA, Kazuo ASAUMI, Shoichi ISHIGAKI,
   Hiromasa SUZUKI
Development of Eco-friendly Process Technology with Polymer
   Masaaki Amikura, Dzung Viet DAO, Koichi Nakamura and Ryo Ota


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